Kla-tencor Technologies Corporation

Ariel Tribble

Lisheng Gao

Ashok V Kulkarni

Kenong Wu

David Winslow Randall

Michal Kowalski

Ingrid B Peterson

Ramon Ynzunza

Kourosh Nafisi

Patrick Huet

Tong Huang

Sharon McCauley

Cecelia Anne Campochiaro

Sandeep Bhagwat

Jianxin Zhang

Vivekanand Kini

Maruti Shanbhag

Various computer-implemented methods are provided. One method for sorting defects in a design pattern of a reticle includes searching for defects of interest in inspection data using priority information associated with individual defects in combination with one or more characteristics of a region proximate the individual defects. The priority information corresponds to modulation levels associated with the individual defects. The inspection data is generated by comparing images of the reticle generated for different values of a lithographic variable. The images include at least one reference image and at least one modulated image. A composite reference image can be generated from two or more reference images. The method also includes assigning one or more identifiers to the defects of interest. The identifier(s) may include, for example, a defect classification and/or an indicator identifying if the defects of interest are to be used for further processing.

Computer-implemented methods for detecting and/or sorting defects in a design pattern of a reticle

Hybrid methods for classifying defects in semiconductor manufacturing are provided. The methods include applying a flexible sequence of rules for defects to inspection data. The sequence of rules includes deterministic rules, statistical rules, hybrid rules, or some combination thereof. The rules included in the sequence may be selected by a user using a graphical interface. The method also includes classifying the defects based on results of applying the sequence of rules to the inspection data.

Flexible hybrid defect classification for semiconductor manufacturing

Growing community of inventors

Fremont, CA, United States of America

Ariel Tribble