Average Co-Inventor Count = 7.00
ph-index = 3
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Mattson Technology, Inc (3 from 278 patents)
3 patents:
1. 7949237 - Heating configuration for use in thermal processing chambers
2. 7269343 - Heating configuration for use in thermal processing chambers
3. 6970644 - Heating configuration for use in thermal processing chambers