Carl Zeiss Microscopy Gmbh

Carl Zeiss Smt Gmbh

Arian Kriesch

Matthias Manger

Martin Ross-Messemer

Ivo Ihrke

Ulrich Vogl

Claudius Weimann

A method for operating a particle beam microscope comprises scanning an object using a particle beam and detecting electrons and x-ray radiation when scanning an object using a particle beam. Improved x-ray radiation information can be generated by combining weighted x-ray radiation information items according to the formula wherein S({right arrow over (r)}) is the detected x-ray radiation intensity assigned to a location {right arrow over (r)}. The following holds true for the weights, for example: wherein I({right arrow over (r)}) represents the intensity of the detected electrons that is assigned to the location {right arrow over (r)}, and σand σare constants.

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Aalen, Germany

Arian Kriesch