Vaisala Oy

Other

Instrumentarium Oy

Outokumpu Oy

Neste Oy

Valtion Teknillinen Tutkimuskeskus

Kemira Oy

Oy Beamex Ab

Vaisala Ox

Engicom N.v.

Ari Lehto

Martti Blomberg

Markku Orpana

Altti Torkkeli

Jouko S Jalava

Heikki T Kuisma

Stefan Lindblad

Lars Stormbom

Hannu Kattelus

Simo Tammela

Yrjo Koskinen

Mauri Luukkala

Pekka Belt

Frank Chen

Martti Juhani Blomberg

Anssi Korhonen

Heikki Mesia

Eero Halonen

Aarne Utriainen

Altti Kaleva Torkkeli

Hannu Harjunmaa

Kalervo A Jappinen

Marja-Riitta Hakala

Juha Lahdenpera

The invention relates to a structure suitable for manufacturing by the fabrication techniques of micro-electronics so as to include an optically black surface that functions as an absorber or emitter, respectively, over a predetermined wavelength range, the structure includes a electrically nonconducting support layer (,), a metallic mirror layer (,) made on the support layer (,), and a lossy layer (,) made on the support layer (,) and the metallic mirror layer (,) superimposed thereon. According to the invention, the mirror layer (,) is made on the upper surface of the support layer (,) and the lossy layer (,) is made from a doped semiconductor material. The thickness of the multilayer structure (,) and the doping of the lossy layer (,) are predetermined relative to each other so that the mirror layer (,) will be optically matched over the predetermined wavelength range of absorption or emission, respectively, to the medium surrounding the structure. The invention also concerns a method for manufacturing the surfaces.

Optically black surface for producing the same

Overpressure protector

The invention is related to an electrically modulatable thermal radiant source with a multilayer structure. The radiant source includes a substrate, a first insulating layer formed onto the substrate, a radiant surface layer formed onto the first insulating layer, a second insulating layer formed on the radiant surface layer, a first metallization (incandescent filament) layer formed on the second insulating layer, a third insulating layer formed on the first metallization layer, and a second metallization layer for contacting formed on the third insulating layer. According to the invention, very thin incandescent filaments are formed from the first metallization layer and surrounded by the other elements of the multilayer structure as a uniform, planar plate.

Electrically modulatable thermal radiant source with specific filament

A miniaturized spectrometer for gas concentration measurement includes a radiation source for admitting electromagnetic radiation onto the gas to be measured, a detector for detecting the radiation transmitted through or emitted from the gas, an electrically tunable Fabry-Perot interferometer placed in the path of the radiation prior to the detector, control electronics circuitry for controlling the radiation source, the interferometer and the detector. The radiation source, the detector, the interferometer and the control electronics are integrated in a miniaturized fashion onto a common, planar substrate and the radiation source is an electrically modulatable micromechanically manufactured thermal radiation emitter.

Miniaturized fabry-perot spectrometer for optical analysis

A single-channel gas concentration measurement method and apparatus. According to the method, a radiant source is employed to generate a measuring signal, the measuring signal is subsequently directed to a measurement object containing a gas mixture to be measured, the measuring signal is subsequently bandpass filtered using at least two passband wavelengths, and the filtered measuring signals are detected by a detector. According to the invention, the bandpass filtering step is implemented by a single electrostatically tunable, short-resonator Fabry-Perot interferometer.

Single-channel gas concentration measurement method and apparatus using

An electrically modulatable radiant source includes an essentially planar substrate, a well or hole formed in the substrate, and at least one incandescent filament attached to the substrate. The incandescent filament is aligned with the well or hole and is formed of a metallic compound which readily oxidizes at an operating temperature of the incandescent filament. An oxidation resistant film encapsulates the incandescent filament to prevent the filament from oxidizing. Furthermore, contact pads are formed on the substrate at both ends of the incandescent filament for feeding electric current to the incandescent filament.

Thermal radiant source with filament encapsulated in protective film

An electrostatically tunable Fabry-Perot interferometer produced by surface micromechanical techniques is used in optical material analysis as an optical sweeping filter in which the optical measurement wavelength is centered at a wavelength .lambda.. The Fabry-Perot interferometer based sensor structure comprises a body block, two essentially parallel mirrors bonded to the body block, of which mirrors at least one is partially transmitting and movable relative to the body block. The mirrors are spaced maximally by a few half-wavelengths, .lambda./2, from each other, and both of the mirror structures include integral electrode structures capable of effecting an electrostatic force between the mirror structures. The movable mirror structure is provided with structurally weakened regions surrounding the optical area of the mirror so as to facilitate keeping the optical area at a maximum degree of flatness. At least one of the electrode structures surrounds the optical area so as to achieve a mechanical lever action and avoid galvanic contact between the electrode of the movable mirror structure and the electrode of the fixed mirror structure.

Electrically tunable fabry-perot interferometer produced by surface

A radiant source including an essentially planar substrate having a well or hole formed therein. At least one incandescent filament is mounted to the substrate and aligned at the well or hole. Contact pads are formed onto the substrate, to both ends of the incandescent filament, and feed electric current to the incandescent filament. Furthermore, each incandescent filament is doped with phosphorus to an impurity concentration of at least 5.times.10.sup.19 atoms/cm.sup.3.

Electrically modulatable thermal radiant source and method for

A calibration method for gas concentration measurement with an NDIR technique based on optical absorption. Radiation is imposed onto the gas mixture under measurement contained in a measurement channel (3) isolated at least partially from its environment, the intensity of radiation transmitted through the gas is measured, the gas concentration is computed from the measured intensity, in order to calibrate the measurement apparatus the gas state variables are deviated in a controlled manner, whereby the level of transmitted radiation intensity is changed, and the intensity of the transmitted radiation is measured in at least two known points of the gas state variables, thus obtaining data for calibration of the measurement apparatus employed. The gas state variables are deviated by heating the gas under measurement in such a short time during which the ambient concentration of the gas undergoes no change, whereby the gas density is decreased with the increasing temperature, while the partial pressure of the gas under measurement stays essentially constant.

Calibration method for gas concentration measurements

A method and an apparatus for measuring dewpoint of different kinds of gases, is based on cooling the measured gas, with the help of cold gas, down to the dewpoint and then detecting the generated mist by optical sensors. The cooling gas is routed to a measurement area (7) from outside the process and the cooling gas is brought to an appropriate temperature below the dewpoint of the measured gas before being conducted to the measurement area (7). Mist generated during the cooling of the measured gas is detected by illuminating the measurement area (7) by a light emitting source (8) and measuring the light (2) scattered from the mist or light (3) penetrating through the mist with the help of a photodetector (9). The temperature of the measurement area is continuously monitored with temperature sensors (10) so that when the mist is detected, the temperature of the measurement area (7) at that instant corresponds to the dewpoint temperature of the measured gas.

Method and apparatus for measurement of dewpoint of gases

An apparatus and method measures the concentration of a gas. The apparatus comprises a radiation source (70) for emitting radiation onto the gas (79) to be measured, whereby the radiation source (70) is comprised of an anode (4) and a cathode (9), and as an emitting fill gas the same as the gas (79) to be measured; and a radiation detector (74) with which the radiation transmitted through the gas (79) to be measured can be detected. The cathode (9) functions as an electron emitter, and between the anode (4) and the cathode is connected such a low operating voltage that does not cause ionization or essential dissociation of the emitting gas. The design provides an approximate temperature tracking of the radiation source with the ambient temperature.

Apparatus and method for measuring gas concentrations

In a novel multilayer transducer (1') with bonded contacts and a method for fabricating the bonded contact areas (5') of the transducer, the contact areas (5') are formed on the side surface (7) of the transducer by metal deposition using laser-based deposition, sputter deposition or another suitable metallization method. By virtue of the fabrication method of the contact areas, the size of the transducer (1')can be reduced and the transducer (1') can be bonded to a circuit board using surface-mount technology.

Multilayer transducer with bonded contacts and method for implementation

A method and an apparatus for measuring dewpoint of different kinds of gases is based upon cooling the measured gas by mixing it with a cold gas down to the dewpoint and then detecting the generated mist by optical sensors. The cooling gas is routed to a measurement area (7) from outside the process and the cooling gas is brought to an appropriate temperature below the dewpoint of the measured gas before being conducted to the measurement area (7) where it is mixed with the measured gas. Mist generated during the cooling of the measured gas is detected by illuminating the measurement area (7) by a light emitting source (8) and measuring the light (2) scattered from the mist or light (3) penetrating through the mist with the help of a photodetector (9).

Disclosed herein is a humidity calibrator device including a base part sealed by plugs, and a replaceable humidity calibrator cartridge. The cartridge contains saturated vapor, saturated salt solution and salt crystals. The cartridge is sealed with a semipermeable membrane and an air-tight protective peel-off foil. The semipermeable membrane, which seals the part of the humidity calibrator cartridge entering the base part of the apparatus provides a separation of the compartment in the base of the apparatus and liquid containing space of the cartridge, allowing permeation of water vapor and preventing permeation of the liquid.

Field usable calibrator for humidity meters

The invention concerns a sensor construction for, e.g., the measurement of gas concentration, including a sensor element; a heating element arranged in conjunction with the sensor, with which the sensor element can be brought to a temperature above the ambient gas atmosphere temperature; and an electronics circuitry section, with which the desired electrical properties of the sensor element can be measured and the heating element of the sensor can be controlled. According to the invention, the sensor element and the electronics circuitry are placed onto the same planar substrate, and the substrate is processed to have adjacent openings around the sensor element area to the immediate vicinity of the area so that the openings extend through the substrate whereby the sensor area is connected to the surrounding part of the substrate and, then, to the electronics circuitry section, only along thin isthmuses remaining between the openings.

Growing community of inventors

Helsinki, Finland

Ari Lehto