Mks Instruments, Inc.

Archibald J DeMone

Robert C Pandorf

Steven D Blankenship

Frank W Thomas

The disclosed heated pressure transducer includes an external enclosure, a first thermal shell housed within the external enclosure, and a sensor housed within the first thermal shell. The transducer further includes a heater for heating the first thermal shell and a control unit for controlling the heater. A tube couples the sensor to a source of heated, pressurized gas and the transducer may further include a tube-heater that is controlled by the control unit for applying heat to the tube. The transducer may also include a second thermal shell housed within the external enclosure with at least a portion of the control unit being housed within the second thermal shell. A heater that is controlled by the control unit may be disposed proximal to the second thermal shell for heating that shell. An auxiliary heater disposed within the first thermal shell for heating the sensor may also be included. Two thermistors may also be included for measuring the temperature of the sensor and the first thermal shell.

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Westford, MA, United States of America

Archibald J DeMone