Taiwan Semiconductor Manufacturing Comp. Ltd.

Arabinda Das

Wun-Jie Lin

Jen-Chou Tseng

Han-Jen Yang

Ching-Hsiung Lo

A semiconductor device includes semiconductor fins on semiconductor strips on a substrate. The semiconductor fins are parallel to each other. A gate stack is over the semiconductor fins, and a drain epitaxy semiconductor region is disposed laterally from a side of the gate stack and on the semiconductor strips. A first dielectric layer is over the substrate, and the first dielectric layer has a first metal layer. A second dielectric layer is over the first dielectric layer, and the second dielectric layer has a second metal layer. Vias extend from the second metal layer and through the first dielectric layer, and the vias are electrically coupled to the drain epitaxy semiconductor region.

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Ottawa, Canada

Arabinda Das