Applied Materials, Inc.

Anup Phatak

Yu Lei

Chong Jiang

Xuesong Lu

Yufei Hu

Hyman W H Lam

Malcolm Emil Delaney

A method includes receiving a plurality of sets of sensor data associated with a processing chamber of a substrate processing system. Each of the plurality of sets of sensor data comprises a corresponding sensor value of the processing chamber mapped to a corresponding spacing value of the processing chamber. The method further includes providing the plurality of sets of sensor data as input to a trained machine learning model. The method further includes obtaining, from the trained machine learning model, one or more outputs indicative of a health of the processing chamber. The method further includes causing, based on the one or more outputs, performance of one or more corrective actions associated with the processing chamber.

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Santa Clara, CA, United States of America

Anup Phatak