Moxtek, Inc.

Anubhav Diwan

Matt Linford

Matthew R Linford

R Stewart Nielson

Bradley R Williams

Fred Lane

Stew Nielson

Shaun Patrick Ogden

Matthew C George

Eric W Gardner

Ted Wangensteen

Bob West

Bhupinder Singh

Mathew Free

Brian Johnson

Matthew C George George

A method of making a polarizer can include applying a liquid with solid inorganic nanoparticles dispersed throughout a continuous phase, then forming this into a different phase including a solid, interconnecting network of the inorganic nanoparticles. This method can improve manufacturability and reducing manufacturing cost. This method can be used to provide an antireflective coating, to provide a protective coating on polarization structures, to provide thin films for optical properties, or to form the polarization structures themselves.

Polarizer nanoimprint lithography

A method of vapor depositing a silane chemical onto a wire grid polarizer can include introducing a silane chemical and water into a chamber where the wire grid polarizer is located. The silane chemical and the water can be in a gaseous phase in the chamber. The silane chemical and the water can be maintained simultaneously in the gaseous phase in the chamber for period of time. The silane chemical and the water can react to form a (R)Si(OH)molecule, where each Ris independently any chemical element or group. A silane coating can be formed on the wire grid polarizer from a chemical reaction of the (R)Si(OH)molecule with the wire grid polarizer and with other (R)Si(OH)molecules. The silane coating can be relatively thick and multi-layer. A thicker or multi-layer silane coating can have improved high temperature resistance relative to a thinner or mono-layer silane coating.

Wire grid polarizer with multi-layer silane conformal coating

Thick, inorganic coatings can be deposited on a polarizer by chemical vapor deposition. In one embodiment, the method can comprise activating a surface of the polarizer with an oxygen plasma in an oven; injecting a solution including tetrakis(dimethylamino)silane dissolved in cyclohexane and water into the oven; and vapor depositing silicon dioxide onto the polarizer. These three steps can be repeated multiple times until desired thickness is attained.

Chemical vapor deposition of thick inorganic coating on a polarizer

An optical device can comprise wireson a face of a substrate, with channel(s)between adjacent wires. Each wirecan include embedded organic moieties. Each wirecan include multiple ribs. Part or all of the wire, the substrate, or both can have a high refractive index n and a low extinction coefficient k. The optical device can have reduced separation of layers of different materials during flexing and temperature changes. The optical device can be manufactured by a method designed for improved manufacturability.

Optical device with wires and organic moieties

A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a silane conformal-coating with chemical formula (1), chemical formula (2), or combinations thereof: A method of applying a conformal-coating over a WGP can include exposing the WGP to Si(R)(R)(R). In the above WGP and method, X can be a bond to the ribs; each Rcan be a hydrophobic group; each R, if any, can be any chemical element or group; d can be 1, 2, or 3, e can be 1, 2, or 3, g can be 0, 1, or 2, and d+e+g=4; Rcan be a silane-reactive-group; and each Rcan be an alkyl group, an aryl group, or combinations thereof.

Wire grid polarizer with silane protective coating

An extractive system, such as SPME, has an adsorptive phase in the form of a porous coating that has essentially vertical, mutually supporting, columnar structures with nanospaces at the boundaries of the grains.

Solid phase coatings for microextraction

Wire grid polarizer with protective coating

Methods of applying silane coatings

A wire grid polarizer and method of making a wire grid polarizer can protect delicate wires of the wire grid polarizer from damage. The wire grid polarizer can include a protective-layer located on an array of wires. The array of wires can further be protected by a chemical coating on an inside surface of the air-filled channels, closed ends of the air-filled channels, damaged wires of the array of wires in a line parallel to an edge of the wire grid polarizer, or combinations thereof. The method can include (i) providing the wire grid polarizer, (ii) applying the protective-layer, by physical vapor deposition or chemical vapor deposition but excluding atomic layer deposition, onto the array of wires, (iii) cutting the wire grid polarizer wafer into multiple wire grid polarizer parts, then (iv) protecting the array of wires.

Wire grid polarizer with protected wires

A wire grid polarizer (WGP) can have a conformal-coating to protect the WGP from oxidation and/or corrosion. The conformal-coating can include a barrier layer with at least one: of aluminum oxide, silicon oxide, silicon nitride, silicon oxynitride, silicon carbide, hafnium oxide, and zirconium oxide. A method of making a WGP can include applying the barrier layer over ribs of a WGP by vapor deposition.

Oxidation and moisture barrier layers for wire grid polarizer

A wire grid polarizer (WGP) can have a phosphonate conformal-coating to protect the WGP from at least one of the following: corrosion, dust, and damage due to tensile forces in a liquid on the WGP. The conformal-coating can include a chemical: where Rcan include a hydrophobic group, Z can include a bond to the ribs, and Rcan be any suitable chemical element or group. A method of applying a phosphonate conformal-coating over a WGP can include exposing the WGP to (R)PO(R)(R), where: i is 1 or 2, j is 1 or 2, k is 0 or 1, and i+j+k=3; each Rcan independently include a hydrophobic group; Rcan include a phosphonate-reactive-group; each Rcan independently include an alkyl group, an aryl group, or combinations thereof; and each R, if any, can independently be any suitable chemical element or group.

Growing community of inventors

Provo, UT, United States of America

Anubhav Diwan