Nanoway Oy

Antti Manninen

Jukka Pekola

Juha Kauppinen

Mikko Leivo

A method for stabilizing a tunnel junction component, in which a mask is formed on the surface of a substrate, and conductors are constructed by evaporation onto the substrate in an evaporation chamber, and at least one thin oxide layer element is oxidized on top of a selected conductor. This remains partly under the following conductor, thus forming a tunnel junction element with those conductors and titanium (Ti) or another gettering substance is evaporated on top of the said following conductor, before the tunnel junction component is removed from the evaporation chamber, when the titanium layer thus created protects the tunnel junction element from the detrimental effects of air molecules.

Stabilized tunnel junction component

A micro refrigerator includes two NIS, normal metal/insulator/superconductor tunnel junction refrigerators formed on a substrate connected in series in a SINIS structure, with a common normal metal element connected therebetween and the superconducting elements outside. The refrigerator includes an insulating membrane thermally isolated from the substrate, and the common normal metal element includes a protrusion extending to the insulating membrane, which refrigerates the insulating membrane and an object placed on the insulating membrane.

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Jyväskylä, Finland

Antti Manninen