Murata Electronics Oy

Vti Technologies Oy

Antti Lipsanen

Anssi Blomqvist

Altti Torkkeli

Petri Klemetti

Kaisa Nera

The invention relates to measuring devices to be used in the measuring of angular velocity and, more precisely, to vibrating micromechanical sensors of angular velocity. In a sensor of angular velocity according to the invention, a mass is supported to the frame of the sensor component by means of an asymmetrical spring structure (), (), (), (), (), () in such a way, that the coupling from one mode of motion to another, conveyed by the spring (), (), (), (), (), (), cancels or alleviates the coupling caused by the non-ideality due to the skewness in the springs or in their support. The structure of the sensor of angular velocity according to the invention enables reliable measuring with good performance, particularly in small vibrating micromechanical solutions for sensors of angular velocity.

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Espoo, Finland

Antti Lipsanen