Koninklijke Philips Corporation N.v.

Antonius T A Peijnenburg

Erik Roelof Loopstra

Johan Cornelis Compter

Petrus C M Frissen

A positioning device comprising a first part ( ) which is movable relatively to a second part ( ) in an X-direction and a Y-direction, said first part ( ) comprising a carrier ( ) on which a system of magnets ( ) is arranged according to a pattern of rows ( ) and columns ( ) extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row ( ) and each column ( ) rotates 90&deg; counter-clockwise. The second part ( ) comprises an electric coil system ( ) with two types of electric coils (C , C ), one type having an angular offset of &plus;45&deg;, and the other type having an offset of &minus;45&deg; with respect to the X-direction. The magnet configuration causes a very strong magnetic field.

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Eindhoven, Netherlands

Antonius T A Peijnenburg