Teradyne, Inc.

Digital Equipment Corporation

Antonios E Prentakis

William D Lewis

Patrick L Hearn

Fernando A Zayas

Frederick A Goodman

In the manufacture of a high capacity data storage device having multiple surfaces for recording information, the yield of the manufacturing process is improved by providing the storage device with a spare surface. If a recording surface is found to be totally defective, or, substantially worse than the other surfaces, as determined by the manufacturing testing procedures, that surface is, by means of a remapping table, logically retired and the information intended for the defective surface is stored on the logically reallocated spare surface.

Method and apparatus for surface reallocation for improved manufacturing

Compliant linkage apparatus for providing, in a single stage, three degrees of freedom in a single plane, the apparatus comprising an upper plate, a lower plate under the upper plate, sliding means for allowing the upper and lower plates to slide relative to each other in X, Y, and theta, and orientation means for causing the plates to attract each other in a particular orientation to resiliently resist relative lateral and rotational displacements of the plates.

Compliant link

Apparatus for loading and unloading wafers including a support structure having associated with it a predetermined wafer engagement position at which wafers can be engaged by the processing machine, a temporary storage device mounted on the support structure for storing a wafer in position for pick up, the flat surfaces of the wafer being parallel to an X-axis and perpendicular to a Z-axis, a first wafer engagement member for carrying the wafer on the first engagement member between the temporary storage device and the engagement position, a first X-direction mover mounted on the support structure and operable to move the first engagement member parallel to the X-axis, a second wafer engagement member for carrying the wafer on the second engagement member between the temporary storage device and the engagement position, a second X-direction mover mounted on the support structure and operable to move the second engagement member parallel to the X-axis independent of the first engagement member, a Z-direction mover mounted on the support structure and operable to move the first and second engagement members in the Z-direction, and a controller to cause the first X-direction mover to move the first engagement member parallel to the X-axis toward the engagement position at the same time as or shortly after the second engagement member moves parallel to said X-axis away from the engagement position.

Apparatus and method for loading and unloading wafers

Pivoting a beam of light in one axis about a remote point by providing means for laterally translating the beam and a pivotal reflector and providing control means responsive to the pivotal position of the reflector to cause the means for laterally translating to translate the beam the amount necessary to cause the light beam from the reflector to be reflected to the remote point.

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Cambridge, MA, United States of America

Antonios E Prentakis