Maxim Integrated Products, Inc.

Invensense, Inc.

Antonio Molfese

Luca Coronato

Matthew Julian Thompson

Gabriele Cazzaniga

Luigi Esposito

A MEMS sensor includes a sensing reference plane, an anchor, a proof mass, and sensing elements. The anchor is coupled to the sensing reference plane and to the proof mass that moves under an external excitation. The sensing elements detect motion normal to the sensing reference plane. A summation of a product of polarity for each sensing element, its area, and its distance to the anchor on one side of an axis line is unequal to a summation of a product of a polarity associated with each sensing element, its associated area, and its distance to the anchor on another side of the axis line. As such, external excitation creates an offset. The offset is substantially constant for curvature angles (0&#xb0;-360&#xb0;) of the sensing reference plane. The offset is greater than zero and is less than a maximum offset for a MEMS sensor with perfect symmetry for its sensing elements.

Offset rejection electrodes

This invention relates generally to semiconductor manufacturing and packaging and more specifically to semiconductor manufacturing in MEMS (Microelectromechanical systems) inertial sensing products. Embodiments of the present invention improve pressure sensor performance (e.g., absolute and relative accuracy) by increasing pressure insensitivity to changes in thermo-mechanical stress. The pressure insensitivity can be achieved by using the array of pressure sensing membranes, suspended sensing electrodes, and dielectric anchors.

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Carugate, Italy

Antonio Molfese