Leybold Aktiengesellschaft

Applied Materials Gmbh & Co Kg

Balzers Und Leybold Deutschland Holding Ag

Leybold Systems Gmbh

Unaxis Deutschland Holding Gmbh

Anton Zmelty

Joachim Szczyrbowski

Christoph Braatz

Michael Geisler

Gerd Kleideiter

G&ouml;tz Teschner

Klaus Hartig

Manfred Stephan Ruske

Dietmar Marquardt

Stephan Roegels

J&uuml;rgen Bruch

Manfred Ruske

Armin Reus

The invention relates to a coating for temperable substrates, in particular of glass panes. This coating comprises for example directly on the substrate an SiNlayer, thereon a CrN layer, thereon a TiOlayer and lastly an SiNlayer.

Glass coating

The invention relates to a glass coating and a method for the production of this glass coating. The glass coating comprises a first layer of ZnO and a second layer of Ag disposed thereon. Before the Ag layer is applied onto the ZnO layer, the latter is irradiated with ions.

A sputtering electrode is switched between two power values at a constant reactive gas flow rate which is selected so that the target of the sputtering electrode is in the metallic mode at the first power value while in the oxide mode at a second power value.

Configuration for coating a substrate by means of a sputtering device

A thermally insulating coating system for curved and/or hardened glass panes includes at least one layer of noble metal enclosed by a lower and an upper blocker layer. An underoxidic NiCrO,layer with a thickness between one &angst; and two nm is embedded into the noble-metal layer. The advantage is that the optical qualities of the coating system are not influenced by the tempering and curving of the glass pane.

Thermally-insulating coating system

Power supply lines (,) connect poles of an alternating current power source (,) to respective cathodes (,) in compartments (,), included among a plurality of adjacent compartments (,), which together form a vacuum chamber (,) and which are connected to each other by a passageway (,). The two compartments (,) with the cathodes (,) are separated from each other by intermediate compartments (,), at least some of which are equipped with additional sputter cathodes (,).

Apparatus for coating a substrate

A system of layers applied to a transparent substrate includes a first layer of an oxide such as ZnO or SnO.sub.2, a second layer of a substoichiometric oxide of Zn or Ta, a third layer of Ag or Cu, a fourth layer of a substoichiometric oxide of Ti, Cr, or Nb, and a fifth layer of similar composition as the first layer. The layers are preferably deposited by magnetron cathode sputtering in an atmosphere which consists of inert gas and, in the case of the oxide layers, a reactive gas.

Pane of transparent material having a low emissivity

In a multi-layer coating for a material of good transparency for visible light, with an emissivity e&lt;0.04 and a light transmission T.gtoreq.78% and with two silver layers of different thickness, three oxide coatings are provided, and very thin metal or metal suboxide coatings as blockers, the oxide layers being alloys of the metals SnMg, SnAl, SnZr, SnTi or SnTa.

Optical filter having multi-layer coating

Method for the manufacture of panes with high transmissivity in the visible spectral range and with a high reflectivity for thermal radiation. The panes are coated by cathode sputtering. To the substrates S there is applied a first coating of a material of the oxide group ZnO, SnO.sub.2, In.sub.2 O.sub.3, TiO.sub.2, ZrO.sub.2, TaO.sub.5, SiO.sub.2, Al.sub.3 O.sub.3, or mixtures thereof, or of one of the nitrides AlN, Si.sub.3 N.sub.4 or their mixtures, or of aluminum oxynitride, titanium oxynitride, zirconium oxynitride or silicon oxynitride or their mixtures, in a thickness of 20 to 60 nm. A second layer 2 follows, of one of the metals Ag, Cu or mixtures thereof, in a thickness of 5 to 30 nm, a third layer 3 of one of the metals Pd or Pt or their mixtures, in a thickness of 0.2 to 5 nm, preferably 0.5 nm, and a fourth layer 4 which, as a metallic or suboxidic (less than stoichiometric) layer of one of the metals Ti, Cr or mixture thereof, or of an alloy with at least 15% of one of the metals, in a thickness of 0.5 to 5 nm, preferably 1.5 nm. Lastly, a fifth layer 5 is applied, of a metal that is the same as that of the first layer 1.

Method for manufacturing panes with high transmissivity in the visible

A coating, composed of an optically effective layer system for substrates, whereby the layer system has a high antireflective effect. On a front side of the substrate, facing the observer, in sequence from the front side to the observer, a first layer is arranged on the substrate, functioning as dielectric and comprising metal oxide. Thereupon follows a second layer comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A third layer follows functioning as dielectric and comprising metal oxide. Thereupon a fourth layer follows comprising nitride, preferably TiN.sub.x (x is equal to or greater than 1, preferably x=1.05). A fifth layer follows functioning as dielectric comprising metal oxide. On a backside of the substrate a TiN.sub.x -layer (x.gtoreq.1, preferably x=1.05) is arranged. The adequate selection of certain materials for the individual layers, of certain layer thicknesses and of a certain sequence of the individual layers results in a surprisingly good antireflective coating, contrast increase and antistatic effect. These good optical features of the layer system are reached with a small number of layers and with thin layer thicknesses. This, in turn, leads to an extremely cost saving manufacturing of the coating.

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Hosbach, Germany

Anton Zmelty