Dr. Johannes Heidenhain Gmbh

Dr. Johannas Heidenhain Gmbh

Anton Sailer

Peter Speckbacher

Georg Flatscher

Michael Allg&auml;uer

Erich Bayer

Martin Ullrich

Walburga Kern

A method for producing a self-supporting electron-optical transparent structure that includes multi-layer strips and recesses located between the multi-layer strips. The method includes applying a first layer to a second layer, presetting a pattern by exposing or irradiating the first layer and etching the pattern out of the first layer so that partial areas of the second layer are uncovered. The method further includes galvanically applying layers to the uncovered partial areas of the second layer so that multi-layer strips are formed thereon and an electron-optical transparent structure is formed and removing the electron-optical transparent structure off the second layer.

Method for producing a self-supporting electron-optical transparent structure, and structure produced in accordance with the method

In a position measuring device, a scale is embodied as a phase grating on which several partial beams impinge and are diffracted and caused to interfere with each other in the scanning unit. The entry angle (&agr;) of the partial beams corresponds to the Littrow angle, so that the diffracted partial beams of &plusmn;1st diffraction order are diffracted at the same angle &bgr;&equals;&agr;. The diffraction efficiency of the scale is particularly great if the flanks of the bars of the scales are at an angle of approximately 70&deg; with respect to the measuring direction, i.e., if the bars and gaps are embodied to be trapezoidal in cross section.

Photoelectric position measuring device

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Traunstein, Germany

Anton Sailer