Imec Vzw

Katholieke Universiteit Leuven

Katholieke Universiteit Leuven, K.u. Leuven Research & Development

Anton Potocnik

Danny Wan

Antoine Pacco

Massimo Mongillo

Jeroen Verjauw

The disclosure relates to a trench capacitor device for a superconducting electronic circuit. The trench capacitor device includes a substrate, a first capacitor electrode, and a second capacitor electrode, each electrode including a superconductor and extending into the substrate. The first electrode is circumferentially enclosed by the second electrode such that an inwardly facing surface of the second electrode faces an outwardly facing surface of the first electrode.

Trench capacitor device for superconducting electronic circuit and superconducting qubit device

A method for forming a modified resonator is provided. In one aspect, the method includes obtaining a resonator on top of a substrate, thereby forming an interface area between a bottom surface of the resonator and a top surface of the substrate. The resonator can include niobium or tantalum. The method also includes contacting the resonator and the substrate with a liquid acidic etching solution selected so as to have a higher etch rate towards the substrate than towards the resonator and a nonzero etch rate towards the resonator.

Resonators

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Leuven, Belgium

Anton Potocnik