Balzers Aktiengesellschaft

Unaxis-balzers Aktiengesellschaft

Anton Kunz

Erich Bergmann

Martin Zaech

Laurent Giacri

Martin Zach

A planet system workpiece support for a vacuum treatment apparatus includes a sun system rotatable in the vacuum treatment apparatus about a sun system axle to be coupled to a drive. At least one planet system is rotatable on planet axle and is supported on the sun system. The planet system has a driving coupling for driving the planet system and the support has at least one moon system supported on the planet system and rotatable about a moon axle with a driving connection to the sun system. At least one workpiece is received on the moon system and the driving connection is established, at least during operation, uninterruptedly between sun system and moon system.

Planetary system workpiece support and method for surface treatment of workpieces

In order to ensure uniform coating of workpieces, workpiece holders carrying said workpieces are rotatably mounted at the edge of a turntable, a plurality of which are fastened in succession at adjustable distances to a drivable shaft. In order to trigger intermittent rotations of the workpiece holders, a driver finger of a driving device engages in each case a drive wheel thereof on each revolution of the turntable, so that the workpiece holders are rotated relative to the turntable through a specific angle in a direction opposite to the direction of rotation of said turntable. In order that no readjustment of the driver finger is required, for example in the case of a change of distances between the turntables, said driver finger is fastened to an extension of a rotating ring, which is mounted on the turntable itself so as to be non-displaceable in the direction of the shaft but rotatable about said shaft. The extension cooperates with a rod serving as a stop, in such a way that rotation of the driving device together with the turntable is prevented.

Workpiece support

A vacuum treatment workpiece support and method for a vacuum treatment apparatus, uses a sun system that is rotatable with respect to the apparatus about a sun system axle. The sun system is coupled to an apparatus-side drive. At least one planet system supported on the sun system, is rotatable about a planet axle and is provided with a driving coupling with respect to the apparatus. At least one moon system is supported on the planet system, and is rotatable about a moon axle with a driving connection to the sun system. A receiver for at least one workpiece is provided on the moon system. The driving connection is established, at least during operation of the apparatus, in an uninterrupted manner, between the sun system and the moon system.

In a vacuum coating apparatus with a rotary-driven substrate carrier, the bearing of the substrate carrier is implemented as a quasi-hydrostatic rotary transmission feedthrough. For receiving the parts to be coated, a mounting is provided which is operationally connected to a drive shaft. The drive shaft has a bearing disk. In operation this bearing disk is hydrostatically supported wherein the bearing can take place on both sides of the bearing disk via at least one annular channel for each side. The drive shaft is carried radially in the wall of the apparatus and the annular channels are disposed in a spring-supported housing. The bearing disk, in turn, is provided with radial channels which are operationally connected with axial channels of the shaft portion of the drive shaft. In this way the bearing of rotary-driven substrate carriers in the vacuum coating apparatus is solved.

Vacuum coating apparatus with rotary-driven substrate carrier

An arrangement for holding and cooling bearing shell blanks (2) positioned one next to the other during a coating process in a vacuum chamber, has cooling body and work piece holding pairs (3) which are detachable from each other and which are connected to one another via a cooling surface (9) and a heat transmission surface (7). A work piece holding part (5) of the cooling body and the work piece holding pair (3) is implemented so that the bearing shell blanks (2) are placed in a concave bearing surface (32) of the holding part during the coating process and are kept, over their entire surface, at a temperature determined by the cooling surface temperature. A temperature gradient can be formed if teflon foil strips are placed on the bearing surface. These allow only a direct heat contact of the apex of the bearing shell blanks (2) with the bearing surface. At the apex then, a deposition of fine particles with a high surface hardness, and at the margins a deposition of coarse particles with a correspondingly lesser surface hardness, take place. During the coating, the work piece holding parts (5) can already be loaded whereby the pass in the production of bearing shells (2) can be considerably shortened.

Arrangement for holding and cooling work pieces positioned next to one

In order to make a connection between a heating wire for the production of a stream of ions and a current conductor terminal the heating wire which is enclosed by a shoe into an axial bore at the end of the current conductor and is clampingly held by a clamping member in form of a sphere pressed against the shoe, whereby a tapered section of the screw bolt is pressed the sphere, said screw bolt being screwed into a tapped hole in the current conductor terminal which extends parallel to the hole in which said shoe is received.

Device for connecting a heating wire to a current conductor terminal

A cylinder is flanged onto the wall of a vacuum chamber in which a workpiece is to be coated and is to brought into contact with a current or power conductor for accomplishing same, and the current conductor in the form of a piston rod extends through this cylinder. The piston rod includes at one end a disk of graphite intended to contact the workpiece. An annular piston which is rigidly mounted on the piston rod is subjected at its outer side to the atmospheric pressure and closes a space off located within the cylinder and enclosed by a bellows, which space communicates with the vacuum chamber. A spiral pressure spring within the cylinder which rests against its bottom and against the inner side of the piston counteracts the atmospheric pressure at the outer side of the piston. In case of a subatmospheric pressure in the space, the piston is moved inwards into the cylinder against the action of the spring and the contact between the current conductor and the workpiece is established automatically. If the vacuum chamber and the space is aerated, the spring urges the piston in the opposite direction such that the current contact is interrupted automatically, thus excluding faulty operator manipulations.

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Triesenberg, Liechtenstein

Anton Kunz