Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Commissariat a L'energie Atomique

Antoine Nowodzinski

Carole Bourbon

Frédéric Le Cras

Didier Bloch

Frédéric Souchon

Vincent Mandrillon

A transduction detection device includes a substrate and a strain gauge suspended above a face of the substrate having a piezoresistive element. At least one portion of the surface of the piezoresistive element is covered by a stack having, successively from the surface of the piezoresistive element, a dielectric layer and an electrically conductive layer.

Detection device having a piezoresistive element having increased capacitance

A method for determining characteristic parameters of an electrostatic actuation oscillator, where the method includes generating a first excitation voltage defined as being the sum of a first sinusoidal voltage and a voltage pulse; applying the first excitation voltage at the input of the oscillator; acquiring in the time domain a first response voltage present at the output of the oscillator when the first excitation voltage is applied at the input of the oscillator; obtaining, by transformation in the frequency domain, a first amplitude spectral density of the first response voltage; determining the characteristic parameters of the oscillator from the first amplitude spectral density.

Method for determining characteristic parameters of an oscillator

A method for determining a quality factor of an electrostatically actuated oscillator, the oscillator having a resonance frequency, the method including generating an excitation voltage defined as being the sum of a sinusoidal voltage and a voltage pulse; applying the excitation voltage at the input of the oscillator; acquiring in the time domain a response voltage present at the output of the oscillator after having ceased applying the excitation voltage at the input of the oscillator; determining the quality factor of the oscillator from the response voltage acquired at the output of the oscillator.

Method for determining the quality factor of an oscillator

The device comprises a first actuating bump made from electrically conducting material with a first contact surface. A second actuating bump made from electrically conducting material is facing the first actuating bump. An electrostatic actuating circuit moves the actuating bumps with respect to one another between a first position and another position. The actuating circuit comprises a device for applying a higher potential on the second actuating bump than on the first actuating bump. A film of electrically insulating material performs electric insulation between the first and second bumps. The electrically insulating material film comprises an interface with a positive ion source and is permeable to said positive ions.

Electrostatic actuator of a mobile structure with improved relaxation of trapped charges

The device comprises first and second contact pads having a contact surface. The first and second contact pads move with respect to one another between an ohmic contact position between these contact surfaces and another position. The device further comprises means for applying a non-uniform electric field around the first contact pad. The electric field has a component in a direction parallel to the contact surface of the first contact pad. A fluid with a first dielectric permittivity value is arranged between the first contact pad and the decontamination electrode. The decontamination device and the fluid are configured in such a way that the electric field generates a force directed towards the decontamination electrode on a contaminant, by dielectrophoresis.

Device with intermittent contact improved by dielectrophoresis

A non-volatile electrochemical memory cell formed of a stack of thin films comprising at least one first active layer, suited to releasing and accepting, in a reversible manner, at least one ion species, at least one second active layer, suited to releasing and accepting said ion species, in a reversible manner, the active layers being based on materials having different compositions and electrochemical potential profiles.

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Saint-Joseph-de-Rivière, France

Antoine Nowodzinski