Metal Process (societe a Responsabilite Limitee)

Antoine Durandet

Jacques Henri Pelletier

The invention relates to a plasma excitation device comprising at least one electrically conductive wire applicator fed form an energy source in the microwave range and means for creating a magnetic field and adapted to create at least one surface having a constant magnetic field of a flux density that corresponds to electron cyclotron resonance. According to the invention, the wire applicator includes the means for creating the magnetic field, with the main component thereof being situated in a cross-section of the applicator and extending over at least a fraction of the length of the applicator, said applicator thus constituting an applicator both of a microwave electric field and of a static magnetic field.

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Paris, France

Antoine Durandet