Average Co-Inventor Count = 4.42
ph-index = 19
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Taiwan Semiconductor Manufacturing Comp. Ltd. (148 from 40,053 patents)
2. Texas Instruments Corporation (1 from 29,103 patents)
149 patents:
1. 12429776 - Lithography method with reduced impacts of mask defects
2. 11921434 - Mask cleaning
3. 11740563 - Mask cleaning
4. 11378894 - Lithography system with an embedded cleaning module
5. 11256179 - Mask cleaning
6. 11137684 - Lithography mask with both transmission-type and reflective-type overlay marks and method of fabricating the same
7. 11092555 - EUV vessel inspection method and related system
8. 11086227 - Method to mitigate defect printability for ID pattern
9. 11073755 - Mask with multilayer structure and manufacturing method by using the same
10. 10976655 - Extreme ultraviolet lithography system, device, and method for printing low pattern density features
11. 10976672 - System and method for performing lithography process in semiconductor device fabrication
12. 10955746 - Lithography method with reduced impacts of mask defects
13. 10831094 - Pellicle for EUV mask and fabrication thereof
14. 10747097 - Mask with multilayer structure and manufacturing method by using the same
15. 10747103 - Pellicle fabrication methods and structures thereof