Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Axcelis Technologies, Inc. (2 from 400 patents)
2 patents:
1. 6803319 - Process for optically erasing charge buildup during fabrication of an integrated circuit
2. 6605484 - Process for optically erasing charge buildup during fabrication of an integrated circuit