Edwards Vacuum LLC

Massachusetts Institute of Technology

Anthony Park Taylor

Luis Fernando Velásquez-García

Techniques for manufacturing miniaturized diaphragm pumps using additive manufacturing techniques, such as polyjet printing, are provided, as are the pumps and systems that result from using such techniques to produce the pumps. The provided pumps include a compression chamber that has a first surface, a second opposed surface, and a conical outer wall that extends between the first surface and the second surface and that has a bowed configuration in which the outer wall has a generally concave shape. A diaphragm is disposed proximate to the compression chamber, and the pump also includes one or more valves that control the flow of fluid between the compression chamber and one more fluid ports. Fluid can be selectively vacuumed into and exhausted out of the compression chambers. Various manufacturing techniques for fabricating the pumps are also provided.

Vacuum pumps and methods of manufacturing the same

The present invention relates to vacuum processing systems in which process gases are introduced in a process chamber and are exhausted through a vacuum processing system exhaust path. Deposits made by the exhausted gases in one or more dry vacuum pumps are removed by introducing hydrofluoric acid upstream of the dry pump while the processing chamber is idle. The hydrofluoric acid is introduced upstream of the dry pump through a nozzle in the foreline or at the inlet to the dry pump.

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Boston, MA, United States of America

Anthony Park Taylor