Average Co-Inventor Count = 5.00
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (2 from 3,783 patents)
2 patents:
1. 6328637 - Method and apparatus for conditioning a polishing pad used in chemical mechanical planarization
2. 6086460 - Method and apparatus for conditioning a polishing pad used in chemical