Nanocerox, Inc.

Other

Ferro Corporation

Anthony C Sutorik

William H Rhodes

Yin S Tang

David Gerald Scerbak

Long Hoang Nguyen

Tom Hinklin

Yie-Shein Her

Xiangdong Feng

M Sharon Paras

The present invention provides substantially spherical composite ceria/titania particles, a method of forming the same, and chemical mechanical polishing compositions comprising such particles. The substantially spherical particles include a substantially crystalline core portion including one or more crystallites having a cubic lattice structure including CeTiO, where x is &#x3c;0.25, and a substantially amorphous cladding covering at least a portion of the substantially crystalline core portion, the substantially amorphous cladding including TiCeO, where y is &#x2266;0.50. The method of forming the particles includes combusting an organic solvent including a cerium salt of a carboxylic acid and a titanium (IV) chelate in a combustion supporting gas and collecting agglomerates comprising two or more substantially spherical particles. The agglomerates can be used as an abrasive material in chemical mechanical polishing compositions to remove film layers during the fabrication of integrated circuit devices.

Substantially spherical composite ceria/titania particles

A composition is provided that includes a plurality of calcined particles of terbium aluminum oxide having a mean particle domain size of between 30 and 600 nanometers. A translucent article having a surface includes polycrystalline terbium aluminum garnet having a mean grain size from 1 to 10 microns and light scattering inclusions of aluminum-rich oxide and/or terbium-rich oxide that are present at less than 2 surface area percent of the surface. A process for forming such an article involves sintering the above provided composition at a temperature between 1500&#xb0; C. and 1700&#xb0; C. to yield a sintered article. The article has improved translucency and even transparency as sintering is performed under vacuum at a temperature between 1610&#xb0; C. and 1680&#xb0; C. Hot isostatic pressing alone or in combination with article polishing also improves article translucency.

Sintered polycrystalline terbium aluminum garnet and use thereof in magneto-optical devices

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Milan, MI, United States of America

Anthony C Sutorik