Spts Technologies Limited

Spp Process Technology Systems UK Limited

Anthony Barrass

Paul G Bennett

Oliver James Ansell

David Andrew Tossell

Paul Bennett

Oliver Ansell

Apparatus for chemically etching a workpiece includes a chamber for receiving a process gas and having a pumping port for extracting exhaust gases, and a workpiece support located in the chamber upstream of the pumping port. The chamber further includes a sub-chamber located upstream of the pumping port and downstream of the workpiece support, and the sub-chamber includes a window and an excitation source, adjacent the window, for creating a plasma in a sample of the exhaust gases to create an optical emission which can be monitored through the window.

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Thornbury, United Kingdom

Anthony Barrass