Tui Laser Ag

Ansgar Matern

Claus Strowitzki

Stephan Geiger

Tobias Pflanz

Thomas Petracek

Martin Kappels

Andreas Goertler

The invention relates to a gas discharge laser including a discharge tube ( ), in which a gas is present and which has at least one aperture ( ) through which a laser beam emerges or at which a laser beam is reflected. For withdrawing a partial amount of the gas contained in the discharge tube ( ), at least one gas withdrawal point ( ) is present, from which the withdrawn gas is supplied to a sintered filter ( ) for being cleaned. The cleaned gas may be led in via at least one gas inlet point ( ) in the zone of the aperture ( ). The invention further relates to a method of operating a gas discharge laser, and the use of a sintered filter for cleaning gas withdrawn from a discharge tube ( ) of a gas discharge laser.

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Germering, Germany

Ansgar Matern