Osram Opto Semiconductors Gmbh

Osram Oled Gmbh

Ansgar Fischer

Karsten Heuser

Marc Philippens

Ralph Paetzold

Richard Scheicher

Martin Mueller

Karl-Heinz Hohaus

Andreas Lovich

Wolfgang Goergen

Johannes Krijne

Erwin Eiling

An arrangement () for holding a substrate () in a material deposition apparatus, which substrate () has a deposition side () upon which material (M) is to be deposited, and which arrangement () comprises: a shadow mask () comprising a number of deposition openings (Di); a support structure () comprising a number of surround openings (Si); and a support structure holding means () for holding the support mask () and/or a substrate holding means () for holding the substrate (), such that the support structure () is on the same side as the deposition side () of the substrate (), and the shadow mask () is positioned between the substrate () and the support structure () such that at least one deposition opening (Di) of the shadow mask () lies within a corresponding surround opening (Si) of the support structure ().

Arrangement for holding a substrate in a material deposition apparatus

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Königsbrunn, Germany

Ansgar Fischer