Hitachi High-tech Corporation

Anoru Suga

Shuhei Yabu

Michio Hatano

Kazuki Ishizawa

An object of the present invention is to reduce the possibility that a filament is broken during observation and a re-measurement is required, to reduce the running cost of an apparatus, and to improve the operating efficiency of the apparatus. The charged particle beam apparatus according to the present invention calculates an imaging time required to generate an observation image of a sample and estimates a remaining usable time of the filament, and when the imaging time is longer than the remaining usable time, presents the fact (see FIG.).

Charged particle beam device

An objective of the present invention is to provide a charged particle beam device capable of estimating a lifetime of a filament of a charged particle beam source with a cheap and simple circuit configuration. The charged particle beam device according to the present invention includes a boosting circuit that boosts a voltage to be supplied to a filament and estimates a remaining duration of the filament using a measured value of a current flowing on a low-voltage side of the boosting circuit (see FIG.).

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Tokyo, Japan

Anoru Suga