Fujimi Incorporated

Anne Miller

Hooi-Sung Kim

Jimmy Granstrom

Chiaki Saito

Kanako Fukuda

Provided herein are methods and compositions for chemical mechanical polishing (CMP) of metals. The present methods and compositions involve the use of a corrosion inhibitor having the general formula CH&#x2014;(OCHCH)-L-R in the CMP slurry composition, where m is an integer between 6 and 11, inclusive of end points, and n is an integer greater than or equal to 6, L is a bond, &#x2014;O&#x2014;, &#x2014;S&#x2014;, &#x2014;R&#x2014;, &#x2014;S&#x2014;R&#x2014;, or &#x2014;O&#x2014;R&#x2014;, where Ris a Calkylene; and R is an anionic group. The present methods and compositions can be used to achieve a high metal removal rate, while effectively inhibiting metal corrosion during CMP, and are particularly useful for CMP of cobalt (Co).

Anti-corrosion polishing composition

Described herein are polishing compositions containing an abrasive and a buffering material, wherein the pH of the polishing composition is about 6 to about 9, and methods of preparing and using the same.

Buffered slurry formulation for cobalt CMP

Provided herein are polishing compositions for removal of Co, for example, selectively over Cu, and methods of their use. A polishing composition comprising an abrasive and one or more Co complexors, where the polishing composition has a pH of 9 or more, and the Co complexor comprises one or more of functional groups selected from phosphonic acid (&#x2014;P(&#x2550;O)(OH)) group or carboxyl (&#x2014;C(&#x2550;O)OH) group.

Polishing slurry for cobalt removal

The polishing composition of the present invention contains an oxidizing agent and a scratch-reducing agent represented by general formula (1) or (2) below. In the formulas, Xand Xare each independently a hydrogen atom, a hydroxyl group, a carboxyl group, a phosphate group, an alkyl group, an aryl group, an alkyl polyamine group, an alkyl polyphosphate group, an alkyl polycarboxylate group, an alkyl polyaminopolyphosphate group, or an alkyl polyaminopolycarboxylate group.

Growing community of inventors

Tualatin, OR, United States of America

Anne Miller