Koninklijke Philips Corporation N.v.

Anne Johannes Wilhelmus Van Lievenoogen

Georgo Zorz Angelis

Frank B Sperling

Justus Bjorn Post

Frank Bernhard Sperling

The present invention relates to a positioning device, e.g. for use as a wafer stage, having a very stable temperature, a very low power consumption and a uniform temperature distribution. A long stroke stage () and a short stroke stage () are stacked upon each other. To initiate a movement of the long stroke stage () and the short stroke stage () in a desired movement direction (M) the long stroke stage () is first moved in an opposite direction (M) that is opposite to the desired movement direction (M) and/or the short stroke stage () is first moved in the desired movement direction (M) for a predetermined time interval and for a distance smaller than the distance (d) between a ferromagnetic center stroke element () and the closest one of two actuators () in a stationary state of the long stroke stage (). Subsequently, the long stroke stage () is moved in the desired movement direction (M).

Positioning device, control device and control method

The present invention relates to a rotary positioning device () comprising a circular magnetic track () generating a magnetic field across a circular air gap (), at least three forcers (), each including a plurality of coils () at least partly disposed with the circular air gap () and each being operable for generating a levitation force in a levitation direction orthogonal to the circular magnetic track and a drive force in a drive direction along the circular magnetic track, said forcers being arranged at different angular positions along said circular magnetic track, and a controller () for providing currents to said forcers for individually controlling the generation of a levitation force and/or a drive force by said forcers for effecting a rotational movement, and/or a tilting movement and/or a translational movement of said circular magnetic track.

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Eindhoven, Netherlands

Anne Johannes Wilhelmus Van Lievenoogen