Stmicroelectronics S.r.l.

Annalisa Aurigemma

Pasqualina Fragneto

Beatrice Rossi

Giacomo Boracchi

Diego Carrera

Lidia Moioli

Mauro Fumagalli

Elena Tagliabue

Paolo Giugni

A device includes image generation circuitry and a convolutional neural network. The image generation circuitry, in operation, generates a binned representation of a wafer defect map (WDM). The convolutional-neural-network, in operation, generates and outputs an indication of a root cause of a defect associated with the WDM based on the binned representation of the WDM and a data-driven model associating WDMs with classes of a defined set of classes of wafer defects.

Wafer manufacturing system, device and method

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Monza, Italy

Annalisa Aurigemma