Stmicroelectronics S.r.l.

Anna Ponza

Riccardo Depetro

Pietro Montanini

Antonio Gallerano

A process for the fabrication of an integrated device in a semiconductor chip envisages: forming a semiconductor layer partially suspended above a semiconductor substrate and constrained to the substrate by temporary anchorages; dividing the layer into a plurality of portions laterally separated from one another; and removing the temporary anchorages, in order to free the portions.

Process for the singulation of integrated devices in thin semiconductor chips

An MOS electronic device is formed to reduce drain/gate capacity and to increase cutoff frequency. The device includes a field insulating layer that covers a drain region, delimits an active area with an opening, houses a body region in the active area, and houses a source region in the body region. A portion of the body region between drain and source regions forms a channel region. A polycrystalline silicon structure extends along the edge of the opening, partially on the field insulating and active layers. The polycrystalline silicon structure includes a gate region extending along a first portion of the edge on the channel region and partially surrounding the source region and a non-operative region extending along a second portion of the edge, electrically insulated and at a distance from the gate region.

Growing community of inventors

Cornedo Vicentino, Italy

Anna Ponza