Carl Zeiss Smt Gmbh

Ann-Kathrin Wandner

Holger Kierey

Willi Anderl

Markus Bauer

Arno Schmittner

Bernhard Weigl

Marcus Schmelzeisen

Andreas Kolloch

The disclosure relates to a cooler for use in a device in a vacuum, wherein the partial pressure of the cooling medium in the vacuum environment during the operation of the cooler is less than 10mbar. The cooler includes a heat sink, wherein a cavity through which the cooling medium flows is formed in the heat sink, and wherein the heat sink includes a connection element which surrounds one end of the cavity through which the cooling medium flows. The cooler also includes a connecting piece for joining a coolant line to the cavity. The connecting piece includes a jacket secured on the connection element by a thermal connecting process. An intermediate layer is between the jacket and the connection element. The jacket exerts a force in the direction of the connection element so that the intermediate layer is under compressive stress in the radial direction during operation of the cooler.

Cooler for use in a device in a vacuum

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Lorch-Waldhausen, Germany

Ann-Kathrin Wandner