Kla-tencor Technologies Corporation

Weifour, Inc.

Anlun Tang

Jamie Michael Sullivan

Rex Runyon

Eric Vella

Dieter Wilk

Ralph T Johnson

Yingwu Lian

Jonglip Choi

Eric N Vella

Dieter E Wilk

Disclosed embodiments pertain to optical assemblies which impart a spatially dependent rotation to linearly polarized light. A pair of optical assemblies may be used to apply a spatially dependent rotation to linearly polarized light in the region between the optical assemblies, and produce a spatially independent rotation after traversing the second optical assembly. A pair of optical assemblies may be used in combination with a wave plate to allow a determination of the Stokes parameters of an elliptically polarized beam of light.

Rapid acquisition ellipsometry

Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square. The PSF provides selective filtering in two directions. In other words, the PSF provides two dimensional filtering.

Two-dimensional UV compatible programmable spatial filter

Disclosed are mechanisms for selectively filtering spatial portions of light emanating from a sample under inspection within an optical system. In one embodiment, a programmable spatial filter (PSF) is constructed from materials that are compatible with light in a portion of the UV wavelength range. In a specific implementation, the PSF is constructed from a UV compatible material, such as a polymer stabilized liquid crystal material. In a further aspect, the PSF also includes a pair of plates that are formed from a UV grade glass. The PSF may also include a relatively thin first and second ITO layer that results in a sheet resistance between about 100 and about 300 &OHgr; per square.

UV compatible programmable spatial filter

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Pleasanton, CA, United States of America

Anlun Tang