Technische Unversität Berlin

Anjin Liu

Dieter Bimberg

Werner Hofmann

An optical sensor for detecting chemical, biochemical or biological substances includes a laser and a semiconductor chip. The sensor includes at least one photodetector and at least one high-contrast grating that are monolithically integrated in the semiconductor chip. The high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector. The coupling behavior of the high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.

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Berlin, Germany

Anjin Liu