Asml Netherlands B.v.

Anjan Prasad Gantapara

Alexander Ypma

Seyed Iman Mossavat

Carlo Lancia

Dirk-Jan Kernkamp

A method of tuning a prediction model relating to at least one particular configuration of a manufacturing device. The method includes obtaining a function including at least a first function of first prediction model parameters associated with the at least one particular configuration, and a second function of the first prediction model parameters and second prediction model parameters associated with configurations of the manufacturing device and/or related devices other than the at least one particular configuration. Values of the first prediction model parameters are obtained based on an optimization of the function, and a prediction model is tuned according to these values of the first prediction model parameters to obtain a tuned prediction mode.

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Veldhoven, Netherlands

Anjan Prasad Gantapara