Newsouth Innovations Pty Limited

Anita Wing Yi Ho-Baillie

Stuart Ross Wenham

Alison Joan Lennon

Martin Andrew Green

Xiaojing Hao

Roland Yudadibrata Utama

Ziheng Liu

Wei Li

The present disclosure provides a method of manufacturing a semiconductor device. Furthermore the present disclosure provides a photovoltaic device and a light emitting diode manufactured in accordance with the method. The method comprises the steps of forming a germanium layer using deposition techniques compatible with high-volume, low-cost manufacturing, such as magnetron sputtering, and exposing the germanium layer to laser light to reduce the amount of defects in the germanium layer. After the method is performed the germanium layer can be used as a virtual germanium substrate for the growth of III-V materials.

Method for forming a virtual germanium substrate using a laser

A method is provided for forming an opening in a layer of a selected material. The method comprises, forming a polymer resist layer over said selected material and plasticising areas of the resist where openings are to be formed. The plasticising is performed by depositing a first solution onto the surface of said polymer resist layer, where the first solution is a plasticiser selected to increase permeability of the polymer resist layer to a second solution, in an area which has absorbed the first solution. The second solution is selected to be an etchant or solvent for the selected material. After the resist layer has been selectively plasticised, it is contacted with the second solution, which permeates the polymer resist layer in the area of increased permeability and forms an opening in the selected material.

Method of forming openings in selected material

Surface processing in which the area to be processed is restricted to a predetermined pattern, can be achieved by: (a) providing a layer of a first reagent over a region of the surface to be processed which at least covers an area of the predetermined pattern; (b) providing one or more further reagents which are further reagents required for the processing of the surface; and (c) applying at least one of the further reagents over the region to be processed according to the predetermined pattern; such that the first reagent acts with the one or more of the further reagents to process the surface only in the area of the predetermined pattern. The process is particularly applicable to etching where an etchant having two or more components is used. In that case at least a first etchant component is applied over the surface and at least one further etchant component is applied in the predetermined pattern.

Method for patterned etching of selected material

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Lane Cove, Australia

Anita Wing Yi Ho-Baillie