Intel Corporation

Anil W Dey

Uygar E Avci

Christopher M Pelto

Dragos Seghete

David J Towner

Che-Yun Lin

Christopher R Ryder

Takayoshi Ito

Stephanie F Sundholm

Mark A Blount

Chamara Abeysekera

Aaron J Welsh

Metal insulator metal capacitors are described. In an example, a capacitor includes a first electrode plate, and a first capacitor dielectric on the first electrode plate. A second electrode plate is on the first capacitor dielectric and is over and parallel with the first electrode plate, and a second capacitor dielectric is on the second electrode plate. A third electrode plate is on the second capacitor dielectric and is over and parallel with the second electrode plate, and a third capacitor dielectric is on the third electrode plate. A fourth electrode plate is on the third capacitor dielectric and is over and parallel with the third electrode plate. In another example, a capacitor includes a first electrode, a capacitor dielectric on the first electrode, and a second electrode on the capacitor dielectric. The capacitor dielectric includes a plurality of alternating first dielectric layers and second dielectric layers.

Metal insulator metal (MIM) capacitor

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Portland, OR, United States of America

Anil W Dey