Qualcomm Incorporated

Anil Kumar Koduru

Seung Hyuk Kang

Ramaprasath Vilangudipitchai

Kamesh Medisetti

Samrat Sinharoy

Gudoor Reddy

Smeeta Heggond

A cell on an IC includes a first set of Mlayer interconnects coupled to a first voltage, a second set of Mlayer interconnects coupled to a second voltage different than the first voltage, and a MIM capacitor structure below the Mlayer. The MIM capacitor structure includes a CTM, a CBM, and an insulator between portions of the CTM and the CBM. The first set of Mlayer interconnects is coupled to the CTM. The second set of Mlayer interconnects is coupled to the CBM. The MIM capacitor structure is between the Mlayer and an Mlayer. The MIM capacitor structure includes a plurality of openings. The MIM capacitor structure is continuous within the cell and extends to at least two edges of the cell. In one configuration, the MIM capacitor structure extends to each edge of the cell.

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San Diego, CA, United States of America

Anil Kumar Koduru