Applied Materials, Inc.

Angela Rose Sico

Michael C Kuchar

Travis Morey

Michael Robert Rice

Andrew Nguyen

Paul Benjamin Reuter

Robert Irwin Decottignies

Mitchell DiSanto

Nagendra V Madiwal

James D Strassner

Sushant Suresh Koshti

Ofer Amir

Adam J Wyatt

Robert M McAndrew

Mainframe with integrated lid

An electronic device manufacturing system may include a chamber port assembly that provides an interface between a transfer chamber and a process chamber. In some embodiments, the chamber port assembly may be configured to direct a flow of purge gas into a substrate transfer area of the chamber port assembly. In other embodiments, a process chamber and/or the transfer chamber may be configured to direct a flow of purge gas into the substrate transfer area. The flow of purge gas into a substrate transfer area may prevent and/or reduce migration of particulate matter from chamber hardware onto a substrate being transferred between the transfer chamber and a process chamber. Methods of assembling a chamber port assembly are also provided, as are other aspects.

Gas systems and methods for chamber ports

Gas apparatus, systems, and methods for chamber ports

Apparatus, methods and systems are provided for sealing the door of a slit valve. In one embodiment, the apparatus includes a seal, adapted to extend along a perimeter of a slit valve door; and a hard stop, disposed between the seal and an outer edge of the slit valve door, and adapted to extend along the length of the seal, wherein the hard stop and elastomer seal fill at least a portion of a gap between the slit valve door and an insert leading to a process chamber.

Methods and apparatus for sealing a slit valve door

Growing community of inventors

Round Rock, TX, United States of America

Angela Rose Sico