Heraeus Sensor Technology Gmbh

Angela Maier

Karlheinz Wienand

Tim Asmus

Karlheinz Ullrich

A sensor, particularly an impedance sensor, for example a soot sensor, is provided which has two mutually electrically insulated electrodes, wherein at least one external electrode is formed from a composite of metal and inorganic oxide as a film pattern having a film thickness of 0.5 to 20 &#x3bc;m. The trace width of the film pattern and the spacing between the traces is 5 to 70 &#x3bc;m and the border region around the conductor trace edge varies less than 10 &#x3bc;m. Both electrodes can be arranged adjacent to each other as a film pattern in a plane. Preferably, the sensor has a heater. For mass production, electrodes are produced as a film pattern having a film thickness of 0.5 to 20 &#x3bc;m on electrically insulating oxide bases and, following full-surface imprinting of a metal powder and oxide-containing paste, the electrodes are structured particularly accurately as traces from the printed film. In particular, the film thickness of the printed film is reduced.

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Aschaffenburg, Germany

Angela Maier