Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v. (1 from 4,822 patents)
2. Lam Research Ag (1 from 110 patents)
1 patent:
1. 8486199 - Ultrasonic cleaning method and apparatus