Macronix International Co., Ltd.

Andy Lin

Wei-Chen Chen

Hung-Hsiang Wang

Hsin-Cheng Liu

Chi-Chen Luo

Shuenn-chuan Yu

Hsin-chen Liu

Shih-Hao Shih

Pan-kai Liu

A gas conduit for a load lock chamber. The gas conduit connects to a gas source to introduce gas from the gas source into the load lock chamber of semiconductor equipment. The structure includes a filter mounted on the top surface of the load lock chamber, a pressure limitative device to maintain a preset pressure of gas source, and a gas inlet device including an inlet end connected to the pressure limitative device and an outlet end connected to the filter, wherein the gas inlet device introduces gas from the gas source into the load lock chamber with its maximum flow rate when breaching the vacuum therein.

Gas conduit for a load lock chamber

A semiconductor process recording apparatus comprises a buffer circuit and a endpoint recording device. The input terminal of the buffer circuit is connected to an external endpoint apparatus for receiving a first signal output from the endpoint apparatus. The output terminal of the buffer circuit is connected to the endpoint recording device for outputting a second signal representative of the first signal in response to the first signal. When receiving the second signal, the endpoint recording device outputs a feedback signal to the buffer circuit on the basis of the second signal. Because the feedback signal is blocked by the buffer circuit, the external endpoint apparatus is protected from the damage caused by the feedback signal, thereby greatly reducing the production cost and rate of semiconductor manufacturing.

Semiconductor process recording apparatus

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Hsinchu, Taiwan

Andy Lin