Tektronix, Inc.

Cyberoptics Semiconductor, Inc.

Andy K Lim

Noah Brummer

Jan P Peeters Weem

Dennis J Bonciolini

An equivalent-time sampling test and measurement instrument for acquiring a repeating pattern signal under test at or near a maximum sampling speed of the test and measurement instrument. The test and measurement instrument includes a first input configured to receive repeating pattern information about a signal under test, a second input configured to receive the signal under test, one or more processors configured to determine an optimized trigger holdoff period that is set based on a minimum trigger holdoff period of a test and measurement instrument, and an acquisition unit configured to acquire a portion of the signal under test every optimized trigger holdoff period.

Pattern acquisitions in equivalent time sampling systems

A wireless sensor is provided to obtain information relating to vibration of wafers or substrates in a semiconductor processing system. In one exemplary embodiment, a wireless substrate-like sensor is provided and includes a power source adapted to provide power to the sensor, a wireless communication module coupled to the power source, and a controller coupled to the power source and the wireless communication module. An acceleration detection component is operably coupled to the controller to provide information relative to acceleration of the sensor in three axes.

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Tigard, OR, United States of America

Andy K Lim