Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Carl Zeiss Multisem Gmbh (1 from 32 patents)
2. Carl Zeiss Smt Gmbh (1,409 patents)
1 patent:
1. 12249478 - Particle beam system for azimuthal deflection of individual particle beams and method for azimuth correction in a particle beam system