Applied Materials, Inc.

Other

Andrzei Kaszuba

Juan Carlos Rocha-Alvarez

Sanjeev Baluja

Thomas E Nowak

Tom K Cho

Scott A Hendrickson

Dustin Wenpin Ho

Dale Robert Du Bois

Inna Shmurun

Ashish Shah

Visweswaren Sivaramakrishnan

Hichem M'Saad

Mark A Fodor

Ndanka O Mukuti

Kazutoshi Maehara

Kentaro Wada

Embodiments of the invention relate generally to an ultraviolet (UV) cure chamber for curing a dielectric material disposed on a substrate and to methods of curing dielectric materials using UV radiation. A substrate processing tool according to one embodiment comprises a body defining a substrate processing region; a substrate support adapted to support a substrate within the substrate processing region; an ultraviolet radiation lamp spaced apart from the substrate support, the lamp configured to transmit ultraviolet radiation to a substrate positioned on the substrate support; and a motor operatively coupled to rotate at least one of the ultraviolet radiation lamp or substrate support at least 180 degrees relative to each other. The substrate processing tool may further comprise one or more reflectors adapted to generate a flood pattern of ultraviolet radiation over the substrate that has complementary high and low intensity areas which combine to generate a substantially uniform irradiance pattern if rotated. Other embodiments are also disclosed.

Apparatus and method for exposing a substrate to UV radiation using a reflector having both elliptical and parabolic reflective sections

Apparatus and method for exposing a substrate to a rotating irradiance pattern of UV radiation

Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors

Apparatus and method for exposing a substrate to UV radiation while monitoring deterioration of the UV source and reflectors

Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors

A substrate support comprises a ceramic disc with an electrode that is chargeable through an electrode terminal. An electrical connector connects an external power source to the electrode terminal. The electrical connector has a pair of opposing pincer arms, a groove sized to fit around the electrode terminal, and a pair of through holes to receive a tightening assembly capable of tightening the opposing pincer arms about the electrode terminal.

Substrate support with clamping electrical connector

Growing community of inventors

San Jose, CA, United States of America

Andrzei Kaszuba