Nikon Corporation

Robert Boschgmbh

Nikon Metrology Nv

Andriy Denysov

Atsushi Yamada

Takeshi Endo

Shohei Suzuki

Richard Poole

Andrew Quigley

Takashi Watanabe

Stephen Fletcher

Nicholas Butcher

A charged particle device includes an electron emitting part for emitting electrons, an electron irradiated part configured to be irradiated with the electrons emitted from the electron emitting part, a container part configured to evacuate an interior thereof and contain the electron irradiated part in the interior thereof, an electric wire containing part configured to be inserted from an outside of the container part via an insertion part provided in the container part to contain an electric wire through which electricity is conducted to the electron irradiated part contained in the container part, and an insertion-part-side protrusion part configured to surround the electric wire containing part and protrude from a vicinity of the insertion part on an inner wall of the container part to an interior of the container part.

Charged particle device, structure manufacturing method, and structure manufacturing system

Growing community of inventors

Milton Keynes, United Kingdom

Andriy Denysov