International Business Machines Corporation

Andrie S Yapsir

Klaus D Beyer

Victor J Silvestri

Louis L Hsu

Dominic Joseph Schepis

Shaw-Ning Mei

San-Mei Ku

An integrated circuit decoupling capacitor is divided into a plurality of discrete segments. The segments are connected electrically in parallel and are redundant to an extent that if one segment (or if desired more than one segment) fails, the remaining segments have sufficient capacitance to provide the required decoupling function. Each decoupling capacitor segment has a fuse connected in series with it. The fuse opens in response to a fault in a decoupling capacitor segment that would otherwise cause that segment to short the power supply to ground.

Self protective decoupling capacitor structure

A method and the resulting product for isolating lightly doped silicon islands from each other and from a common substrate. The substrate is covered with a first heavily doped epi layer. The first layer is covered with a lightly doped second epi layer. A pair of spaced deep trenches are provided which extend from the top surface of the second layer, through the first layer and into the substrate. The interior walls of the trenches are lined with oxide. A pair of heavily doped reach-through diffusions extending from said top surface to the first layer is oriented perpendicularly to the deep trenches and fully extends between the trenches. The heavily doped reach-through diffusions and the contiguous first layer are removed by a single anisotropic etching step to yield silicon islands isolated by air except where the islands contact the oxide-lined deep trenches. The air isolation preferably is partially replaced with other dielectric material.

Reach-through isolation silicon-on-insulator device

Reach-through isolation etching method for silicon-on-insulator devices

A method of forming a thin silicon SOI layer by wafer bonding, the thin silicon SOI layer being substantially free of defects upon which semiconductor structures can be subsequently formed, is disclosed. The method comprises the steps of:

Method of producing a thin silicon-on-insulator layer

A method for isolating a film from a substrate 50 includes the steps of: providing an N+ layer 52 on the substrate 50; forming an insulation layer 54 onto the N+ doped layer 52; etching a pair of trenches 56, 58 through the insulation layer 52 to thereby form an isolation region 60 of insulation material; laterally etching a cavity 62 underneath the isolation region; and, forming a film 64 onto the isolation region.

Isolated films using an air dielectric

A method for isolating areas of silicon from a substrate 50 includes the steps of: providing a buried N+ region 52 in the substrate; forming an intrinsic epitaxial layer 12 onto the N+ region; etching trenches 18, 20 through the intrinsic epitaxial layer to thereby form a desired isolation region 16 of intrinsic epitaxial material; laterally etching a cavity 22 underneath the desired isolation region; and, forming an insulation layer 24 of insulation material along the bottom of the desired isolation region exposed by the former etching steps.

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Pleasant Valley, NY, United States of America

Andrie S Yapsir