Comet Ag

Comet Ag Plasma Control Technologies

Trumpf Huttinger Gmbh + Co. Kg

André Grede

Daniel Gruner

Anton Labanc

Christian Bock

Markus Winterhalter

Manuel Vor Dem Brocke

Roland Schlierf

Alberto Pena Vidal

Christoph Hofstetter

Nikolai Schwerg

Thomas Fink

Christian Wangler

Markus Reiff

Andreas Hartmann

Philippe Dennler

Cyril Guinnard

Armin Bannwarth

Alexander Alt

Roland Sistemich

Samuel Vogel

Adam Galos

Kai Pankratz

René Rüttgers

Anton Dr Labanc

Daniel Dr Gruner

A method for generating an RF signal preferably for a plasma chamber including the steps of: generating an input RF signal on the basis of a first set of control parameters; detecting at least one distorted RF signal; synchronizing the at least one distorted RF signal with the input RF signal; determining a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters based on the comparison of the target RF signal and the at least one distorted RF signal being synchronized; and generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced.

Method for generating an RF signal, controller, RF generator and plasma apparatus

Provided is a generator including a power amplifier, at least one sampler, an RF output, a signal generator, a controller including a digital control portion and an analogue control portion, an analogue feedback path between the at least one sampler and the controller enabling an analogue signal representation of a signal to be provided to the controller, and a digital feedback path between the at least one sampler and the controller enabling a digital signal representation of the signal to be provided to the controller. The controller is configured to adjust the RF signal at the RF output from a first state into a second state based on the analogue signal representation and/or the digital signal representation.

RF power generator with analogue and digital detectors

A radio-frequency generator, including a power amplifier module including a power amplifier, a pickup module connected to an output of the power amplifier to generate a pickup signal, and an output configured to be connected to the respective output of the amplifier and configured to output a radio-frequency output signal. The radio-frequency generator includes a measurement module configured to receive the pickup signal and to generate a measurement signal based on the one pickup signal; and a radio-frequency signal generation module configured to generate two or more carrier signals of different frequency, and to provide a drive signal as input to the power amplifier module, and a regulation module configured to receive the measurement signal, and to regulate the power of the radio-frequency output signal based on the measurement signal.

Radio frequency generator

A radiofrequency, RF, power amplifier, including at least one field-effect transistor, FET, wherein a source terminal of the at least one FET is connected to ground. At least one diode is included, wherein a cathode of the at least one diode is connected to a drain terminal of the at least one FET and an anode of the at least one diode is connected to ground. An output network is connected to the drain terminal of the at least one FET. An input network is connected to a gate terminal of the at least one FET.

Radiofrequency power amplifier

A control unit for generating a plurality of synchronized radio frequency (RF) output signals (RF) each having a respective output frequency (f), phase (Φ), and amplitude (A), including The disclosure further describes a radio frequency (RF) power generator, an arrangement of at least two such radio frequency (RF) power generators, and a method each for generating a plurality of synchronized radio frequency (RF) output signals (RF).

Control unit, radio frequency power generator, and method for generating synchronized radio frequency output signals

A device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

Device and method for synchronizing a high frequency power signal and an external reference signal

The invention relates to a directional coupler comprising a non-straight main conductor line for receiving a high power signal and at least one coupling element. The main conductor line is arranged to run in a plane P. The at least one coupling element is arranged sectionally parallel to the main conductor line. Further, the invention relates to a method for measuring RF voltage and/or RF power using a directional coupler. The method comprises the steps of combining the measured signals of the directional coupler and the measured voltage and current values of the VI sensor unit. In case, one of the measured signals has a low or zero level the sensitivity of the measuring of RF voltage and/or RF power is increased.

Directional coupler

The invention relates to a device for synchronizing a periodic high frequency power signal () and an external reference signal (). The device comprises a phase control circuit () and a digital oscillator circuit (). The digital oscillator circuit () is connected to the phase control circuit (). The digital oscillator circuit () comprises means for generating the periodic high frequency power signal () dependent on the control signal from the phase control circuit. The phase control circuit () is configured to determine a phase difference of the periodic high frequency power signal () and the external reference signal ().

An apparatus which includes: a circuit board having a radiofrequency (RF) structure at a first location thereof, the RF structure formed from a conductive trace of the circuit board; a heat carrier; and a multi-stack cooling structure coupling the circuit board and the heat carrier to each other. The multi-stack cooling structure including a first stack adjacent the RF structure at the first location and a second stack at a second location. The first stack including a dielectric layer adjacent the heat carrier, and a thermal interface material (TIM) that couples the dielectric layer and the circuit board to each other, the dielectric layer having higher thermal conductivity and higher rigidity than the TIM. The second stack including a metal layer adjacent the heat carrier, and the TIM that couples the metal layer and the circuit board to each other.

Multi-stack cooling structure for radiofrequency component

Growing community of inventors

Bern, Switzerland

André Grede