Asml Netherlands B.v.

Andrey Valerievich Rogachevskiy

Arjan Gijsbertsen

Bastiaan Andreas Wilhelmus Hubertus Knarren

Willem Richard Pongers

Martin Jules Marie-Emile De Nivelle

Doru Cristian Torumba

Cristina Caresio

Raymund Centeno

Viktor Trogrlic

Tabitha Wangari Kinyanjui

Jan Arie Den Boer

The present invention provides a method for calculating a corrected substrate height map of a first substrate using a height level sensor. The method comprises: sampling the first substrate by means of the height level sensor with the first substrate moving with a first velocity, wherein the first velocity is a first at least partially non-constant velocity of the first substrate with respect to the height level sensor, to generate a first height level data, generating a first height map based on the first height level data, and calculating a corrected substrate height map by subtracting a correction map from the first height map, wherein the correction map is calculated from the difference between a first velocity height map and a second velocity height map.

Height measurement method and height measurement system

An apparatus for measuring a height of a substrate for processing in a lithographic apparatus is disclosed. The apparatus comprises a first sensor for sensing a height of the substrate over a first area. The apparatus also comprises a second sensor for sensing a height of the substrate over a second area. The apparatus further comprises a processor adapted to normalize first data corresponding to a signal from the first sensor with a second sensor footprint to produce a first normalized height data, and to normalize second data corresponding to a signal from the second sensor with a first sensor footprint to produce a second normalized height data. The processor is adapted to determine a correction to a measured height of the substrate based on a difference between the first and second normalized height data.

Apparatus and method for measuring substrate height

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Den Bosch, Netherlands

Andrey Valerievich Rogachevskiy